Preparation and application of lead zirconate titanate (PZT) films deposited by hybrid process: Sol-gel method and laser ablation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6664-6668

  Tsaur, Jiunnjye ^a   Wang, Zhan Jie ^b   Zhang, Lulu ^a   Ichiki, Masaaki ^a   Wan, Jiang Wen ^a   Maeda, Ryutaro ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Hybrid; Laser ablation; Micromirror; Perovskite; PZT; Sol gel method

Indexed keywords

DEPOSITION; LASER ABLATION; SOL-GELS; TITANATE MINERALS; ZIRCON;

HYBRID; MICROMIRROR; PZT; SOL-GEL METHOD;

THIN FILMS;

EID: 0742277371     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.6664     Document Type: Article

References (16)

1. R. Maeda, Z. J. Wang, J. Chu, J. Akedo, M. Ichiki and S. Yonekubo: Jpn. J. Appl. Phys. 37 (1999) 7116.
2. Z. J. Wang, R. Maeda and K. Kikuehi: Trans. IEEE Jpn. 119-E (1999) 255.
3. B. Jaffe, W. R. Cook and H. Jaffe: Piezoelectric Ceramics (Academic Press, 1971) p. 259.
4. K. Aoki, Y. Fukuda, K. Numata and A. Nishimura: Ext. Abstr. Jpn. Soc. Appl. Phys. (1995) p.402.
5. ) B. A. Tuttle, R. W. Schwartz, D. H. Doughty and J. A. Voigt: Mater. Res. Soc. Symp. Proc. 200 (1993) 159.
6. Z. J. Wang, K. Kikuchi and R. Maeda: Jpn. J. Appl. Phys. 39 (2000) 5413.
7. Z. J. Wang, R. Maeda and K. Kikuehi: Proc. SPIE 3680 (1999) 948.
8. Z. J. Wang, R. Maeda and K. Kikuehi: J. Mater. Sci. 35 (2000) 5915.
9. J. G. Smits and W. S. Choi: Proc. IEEE Trans. 38 (1991) 256.
10. V. Walter, P. Delobelle, P. L. Moal, E. Joseph and M. Collet: J. Sens. & Actuat. A 96 (2002) 157.
11. A. Schroth, M. Ichiki and R. Maeda: Proc. SPIE 3242 (1997) 380.
12. T. Gessner, S. Kurth, C. Kaufmann, J. Markert, A. Ehrlich and W. Dotzel: Proc. SPIE 4178 (2000) 338.
13. Y. Yee, J. U. Bu, M. Ha, J. Choi, H. Oh, S. Lee and H. Nam: Proc. Micro Electro Mechanical Systems (2001) p. 317.
14. W. Lang, H. Parlicek, Th. Marx, H. Scheithauer and B. Schmidt: J. Sens. & Actuat. 74 (1999) 216.
15. G. J. Su, S. Lee and M. C. Wu: IEEE Photon. Technol. Lett. 11 (1999) 587.
16. M.-H. Kiang, O. Solgaard and R. S. Muller: J. Sens. & Actuat. 70 (1998) 195.