Microelectromechanical flexure PZT actuated optical scanner: Static and resonance behavior

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1285-1293

  Smits, Johannes G ^a,b   Fujimoto, Koji ^a,c   Kleptsyn, Vladimir F ^a  

^a Boston University   (United States)

^b Scaldix B V   (Netherlands)

^c MEMS Center DNP Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELECTRIC EXCITATION; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; RESONANCE; SCANNING; SILICON WAFERS; THIN FILMS;

LEAD ZIRCONATE TITANATE (PZT); OPTICAL SCANNERS; PIEZOELECTRIC EXCITATION; VIBRATION SENSORS;

OPTICAL SYSTEMS;

EID: 18744385817     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/021     Document Type: Article

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