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Volumn 54, Issue 5, 2007, Pages 1101-1107

A generalized reaction-diffusion model with explicit H-H2 dynamics for negative-bias temperature-instability (NBTI) degradation

Author keywords

Hydrogen; MOSFET; Negative bias temperature instability (NBTI); Reliability; Saturation; Time dependence

Indexed keywords

COMPUTER SIMULATION; DEGRADATION; HYDROGEN; MOLECULAR DYNAMICS; MOSFET DEVICES; RELIABILITY; SATURATION (MATERIALS COMPOSITION);

EID: 34247846349     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.893809     Document Type: Article
Times cited : (95)

References (34)
  • 1
    • 84949193854 scopus 로고    scopus 로고
    • Impact of negative bias temperature instability on digital circuit reliability
    • V. Reddy et al., "Impact of negative bias temperature instability on digital circuit reliability," in Proc. IEEE IRPS, 2002, pp. 248-254.
    • (2002) Proc. IEEE IRPS , pp. 248-254
    • Reddy, V.1
  • 3
    • 19044394081 scopus 로고    scopus 로고
    • A geometrical unification of the theories of NBTI and HCI time-exponents and its implications for ultrascaled planar and surround-gate MOSFETs
    • H. Küflüog̃lu and M. A. Alam, "A geometrical unification of the theories of NBTI and HCI time-exponents and its implications for ultrascaled planar and surround-gate MOSFETs," in IEDM Tech. Dig. 2004, p. 113.
    • (2004) IEDM Tech. Dig , pp. 113
    • Küflüog̃lu, H.1    Alam, M.A.2
  • 4
    • 19044366271 scopus 로고    scopus 로고
    • Mechanism of negative bias temperature instability in CMOS devices: Degradation, recovery and impact of nitrogen
    • S. Mahapatra, B. P. Kumar, T. R. Dalei, D. Saha, and M. A. Alam, "Mechanism of negative bias temperature instability in CMOS devices: Degradation, recovery and impact of nitrogen," in IEDM Tech. Dig. 2004, pp. 105-108.
    • (2004) IEDM Tech. Dig , pp. 105-108
    • Mahapatra, S.1    Kumar, B.P.2    Dalei, T.R.3    Saha, D.4    Alam, M.A.5
  • 5
    • 0000953056 scopus 로고
    • Chemistry of Si-SiO2 interface trap annealing
    • Jun
    • M. L. Reed and J. D. Plummer, "Chemistry of Si-SiO2 interface trap annealing," J. Appl. Phys., vol. 63, no. 12, pp. 5776-5793, Jun. 1988.
    • (1988) J. Appl. Phys , vol.63 , Issue.12 , pp. 5776-5793
    • Reed, M.L.1    Plummer, J.D.2
  • 6
    • 34247887177 scopus 로고    scopus 로고
    • On the dispersive versus Arrhenius temperature activation of NBTI time evolution
    • D. Varghese, D. Saha, S. Mahapatra, K. Ahmed, F. Nouri, and M. A. Alam, "On the dispersive versus Arrhenius temperature activation of NBTI time evolution," in IEDM Tech. Dig., 2005, pp. 684-687.
    • (2005) IEDM Tech. Dig , pp. 684-687
    • Varghese, D.1    Saha, D.2    Mahapatra, S.3    Ahmed, K.4    Nouri, F.5    Alam, M.A.6
  • 7
    • 33847757101 scopus 로고    scopus 로고
    • Material dependence of Hydrogen diffusion: Implications for NBTI degradation
    • A. Krishnan et al., "Material dependence of Hydrogen diffusion: Implications for NBTI degradation," in IEDM Tech. Dig., 2005, pp. 688-691.
    • (2005) IEDM Tech. Dig , pp. 688-691
    • Krishnan, A.1
  • 8
    • 76349111305 scopus 로고    scopus 로고
    • A comprehensive framework for predictive modeling of negative bias temperature instability
    • S. Chakravarthi, A. Krishnan, V. Reddy, C. F. Machala, and S. Krishnan, "A comprehensive framework for predictive modeling of negative bias temperature instability," in Proc. IEEE IRPS, 2004, p. 273.
    • (2004) Proc. IEEE IRPS , pp. 273
    • Chakravarthi, S.1    Krishnan, A.2    Reddy, V.3    Machala, C.F.4    Krishnan, S.5
  • 9
    • 33646147793 scopus 로고    scopus 로고
    • Negative bias temperature instability mechanism: The role of molecular hydrogen
    • 153518 3 pages
    • A. Krishnan, S. Chakravarthi, P. Nicollian, V. Reddy, and S. Krishnan, "Negative bias temperature instability mechanism: The role of molecular hydrogen," Appl. Phys. Lett., vol. 88, pp. 153 518:1-153 518:3, 2006.
    • (2006) Appl. Phys. Lett , vol.88 , Issue.15
    • Krishnan, A.1    Chakravarthi, S.2    Nicollian, P.3    Reddy, V.4    Krishnan, S.5
  • 11
    • 0017493207 scopus 로고
    • Negative bias of MOS devices at high electric fields and degradation of MNOS devices
    • May
    • A. K. O. Jeppson and C. M. Svensson, "Negative bias of MOS devices at high electric fields and degradation of MNOS devices," J. Appl. Phys., vol. 48, no. 5, pp. 2004-2014, May 1977.
    • (1977) J. Appl. Phys , vol.48 , Issue.5 , pp. 2004-2014
    • Jeppson, A.K.O.1    Svensson, C.M.2
  • 12
    • 0842266644 scopus 로고    scopus 로고
    • A new observation of enhanced bias temperature instability in thin gate oxide p-MOSFETs
    • S. Mahapatra, P. B. Kumar, and M. A. Alam, "A new observation of enhanced bias temperature instability in thin gate oxide p-MOSFETs," in IEDM Tech. Dig., 2003, p. 337.
    • (2003) IEDM Tech. Dig , pp. 337
    • Mahapatra, S.1    Kumar, P.B.2    Alam, M.A.3
  • 13
    • 0842266651 scopus 로고    scopus 로고
    • A critical examination of the mechanics of dynamic NBTI for PMOSFETs
    • M. A. Alam, "A critical examination of the mechanics of dynamic NBTI for PMOSFETs," in IEDM Tech. Dig., 2003, p. 345.
    • (2003) IEDM Tech. Dig , pp. 345
    • Alam, M.A.1
  • 15
    • 0842309776 scopus 로고    scopus 로고
    • Universal recovery behavior of negative bias temperature instability
    • S. Rangan, N. Mielke, and E. C. C. Yeh, "Universal recovery behavior of negative bias temperature instability," in IEDM Tech. Dig., 2003, p. 341.
    • (2003) IEDM Tech. Dig , pp. 341
    • Rangan, S.1    Mielke, N.2    Yeh, E.C.C.3
  • 16
    • 33646030846 scopus 로고    scopus 로고
    • On quasi-saturation of negative bias temperature degradation
    • Oct
    • M. A. Alam and H. Küflüog̃lu, "On quasi-saturation of negative bias temperature degradation," in Proc. 208th Meeting ECS, Oct. 2005.
    • (2005) Proc. 208th Meeting ECS
    • Alam, M.A.1    Küflüog̃lu, H.2
  • 18
    • 0041340533 scopus 로고    scopus 로고
    • Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing
    • Jul
    • D. K. Schroder and J. A. Babcock, "Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing," J. Appl. Phys., vol. 94, no. 1, pp. 1-18, Jul. 2003.
    • (2003) J. Appl. Phys , vol.94 , Issue.1 , pp. 1-18
    • Schroder, D.K.1    Babcock, J.A.2
  • 19
    • 10044266222 scopus 로고    scopus 로고
    • A comprehensive model of PMOS NBTI degradation
    • Jan
    • M. A. Alam and S. Mahapatra, "A comprehensive model of PMOS NBTI degradation," Microelectron. Reliab., vol. 45, no. 1, pp. 71-81, Jan. 2005.
    • (2005) Microelectron. Reliab , vol.45 , Issue.1 , pp. 71-81
    • Alam, M.A.1    Mahapatra, S.2
  • 21
    • 14944357992 scopus 로고    scopus 로고
    • 2 interface, Phys. Rev. B, Condens. Matter, 70, no. 24, pp. 245 320-245 325, Dec. 2004.
    • 2 interface," Phys. Rev. B, Condens. Matter, vol. 70, no. 24, pp. 245 320-245 325, Dec. 2004.
  • 23
    • 34247847473 scopus 로고    scopus 로고
    • T measurements
    • T measurements," in Proc. IRPS 2006, pp. 448-453.
    • (2006) Proc. IRPS , pp. 448-453
    • Reisinger, H.1
  • 24
    • 4544257707 scopus 로고    scopus 로고
    • A model for negative bias temperature instability (NBTI) in oxide and high-κ pFETs
    • S. Zafar, B. H. Lee, J. Stathis, A. Callegari, and T. Ning, "A model for negative bias temperature instability (NBTI) in oxide and high-κ pFETs," in VLSI Symp. Tech. Dig., 2004, pp. 208-209.
    • (2004) VLSI Symp. Tech. Dig , pp. 208-209
    • Zafar, S.1    Lee, B.H.2    Stathis, J.3    Callegari, A.4    Ning, T.5
  • 26
    • 26444610676 scopus 로고    scopus 로고
    • A new oxide trap-assisted NBTI degradation model
    • Sep
    • N. K. Jha and V. R. Rao, "A new oxide trap-assisted NBTI degradation model," IEEE Electron Device Lett., vol. 26, no. 9, pp. 687-689, Sep. 2005.
    • (2005) IEEE Electron Device Lett , vol.26 , Issue.9 , pp. 687-689
    • Jha, N.K.1    Rao, V.R.2
  • 27
    • 17044380280 scopus 로고    scopus 로고
    • M. Houssa, M. Aoulaiche, S. De Gendt, G. Groeseneken, M. M. Heyns, and A. Stesmans, Reaction-dispersive proton transport model for negative bias temperature instabilities, Appl. Phys. Lett., 86, no. 9, pp. 093 506 1-093 506 3, Feb. 2005.
    • M. Houssa, M. Aoulaiche, S. De Gendt, G. Groeseneken, M. M. Heyns, and A. Stesmans, "Reaction-dispersive proton transport model for negative bias temperature instabilities," Appl. Phys. Lett., vol. 86, no. 9, pp. 093 506 1-093 506 3, Feb. 2005.
  • 28
    • 0042281583 scopus 로고    scopus 로고
    • Dynamic recovery of negative bias temperature instability in p-type metal-oxide-semiconductor field-effect transistors
    • M. Ershov et al., "Dynamic recovery of negative bias temperature instability in p-type metal-oxide-semiconductor field-effect transistors," Appl. Phys. Lett., vol. 83, no. 8, pp. 1647-1649, 2003.
    • (2003) Appl. Phys. Lett , vol.83 , Issue.8 , pp. 1647-1649
    • Ershov, M.1
  • 29
    • 21644455928 scopus 로고    scopus 로고
    • On-the-fly characterization of NBTI in ultra-thin gate oxide PMOSFETs
    • M. Denais et al., "On-the-fly characterization of NBTI in ultra-thin gate oxide PMOSFETs," in IEDM Tech. Dig., 2004, pp. 109-112.
    • (2004) IEDM Tech. Dig , pp. 109-112
    • Denais, M.1
  • 30
    • 84932126501 scopus 로고    scopus 로고
    • Hole trapping effect on methodology for dc and ac negative bias temperature instability measurements in PMOS transistors
    • V. Huard and M. Denais, "Hole trapping effect on methodology for dc and ac negative bias temperature instability measurements in PMOS transistors," in Proc. IEEE IRPS, 2004, pp. 40-45.
    • (2004) Proc. IEEE IRPS , pp. 40-45
    • Huard, V.1    Denais, M.2
  • 31
    • 46049087186 scopus 로고    scopus 로고
    • A. Islam et al., Gate leakage vs. NBTI for plasma nitrided oxides: Characterization, physical principles and optimization, in IEDM Tech. Dig., 2006, p. 12.4.1.
    • A. Islam et al., "Gate leakage vs. NBTI for plasma nitrided oxides: Characterization, physical principles and optimization," in IEDM Tech. Dig., 2006, p. 12.4.1.
  • 32
    • 85056913947 scopus 로고    scopus 로고
    • On the physical mechanism of NBTI in silicon oxynitride p-MOSFETs: Can differences in insulator processing conditions resolve the interface trap generation versus hole trapping controversy?
    • to be published
    • S. Mahapatra et al., "On the physical mechanism of NBTI in silicon oxynitride p-MOSFETs: Can differences in insulator processing conditions resolve the interface trap generation versus hole trapping controversy?" in Proc. IRPS, 2007. to be published.
    • (2007) Proc. IRPS
    • Mahapatra, S.1
  • 33
    • 24944493371 scopus 로고    scopus 로고
    • A computational model of NBTI and hot carrier injection time-exponents for MOSFET reliability
    • H. Küflüog̃lu and M. A. Alam, "A computational model of NBTI and hot carrier injection time-exponents for MOSFET reliability," J. Comput. Electron., vol. 3, no. 3, pp. 165-169, 2004.
    • (2004) J. Comput. Electron , vol.3 , Issue.3 , pp. 165-169
    • Küflüog̃lu, H.1    Alam, M.A.2
  • 34
    • 33646048788 scopus 로고    scopus 로고
    • Theory of interface-trap-induced NBTI degradation for reduced cross section MOSFETs
    • May
    • H. Küflüog̃lu and M. A. Alam, "Theory of interface-trap-induced NBTI degradation for reduced cross section MOSFETs," IEEE Trans. Electron Devices, vol. 53, no. 5, pp. 1120-1130, May 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.5 , pp. 1120-1130
    • Küflüog̃lu, H.1    Alam, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.