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Volumn 47, Issue 6 III, 2000, Pages 2262-2268
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Reactions of hydrogen with Si-SiO 2 interfaces
a
IEEE
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ASYMMETRIC BARRIER;
SUBOXIDE BONDS;
ANNEALING;
CHEMICAL BONDS;
ELECTRIC FIELDS;
ELECTRON TRAPS;
HYDROGEN;
INTERFACES (MATERIALS);
NUMERICAL ANALYSIS;
PROBABILITY DENSITY FUNCTION;
SEMICONDUCTING SILICON;
SILICA;
RADIATION EFFECTS;
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EID: 0034451168
PISSN: 00189499
EISSN: None
Source Type: Journal
DOI: 10.1109/23.903763 Document Type: Conference Paper |
Times cited : (150)
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References (35)
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