Measurement on the actuating and sensing capability of a PZT microcantilever

Measurement Science and Technology

Volumn 18, Issue 3, 2007, Pages 601-608

  Dong, Weijie ^a   Lu, Xiaoguang ^a   Liu, Mengwei ^a   Cui, Yan ^a   Wang, Jing ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Microactuator; Microcantilever; Microsensor; PZT thin film; Sol gel

Indexed keywords

HYSTERESIS; MICROACTUATORS; MICROMACHINING; MICROSENSORS; SOL-GELS;

MICROCANTILEVER; PIEZOELECTRIC MICROCANTILEVERS; SENSING CAPABILITY;

THIN FILM DEVICES;

HYSTERESIS; MICROACTUATORS; MICROMACHINING; MICROSENSORS; SOL-GELS; THIN FILM DEVICES;

EID: 34247254850     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/3/008     Document Type: Article

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