Sol-gel derived PNNZT thin films for micromachined piezoelectric force sensors

Thin Solid Films

Volumn 299, Issue 1-2, 1997, Pages 88-93

  Lee, Chengkuo ^a,b,c   Itoh, Toshihiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c Bldg 52   (Taiwan)

Author keywords

Micromachining; Piezoelectric effects; Sensors; Sol gels

Indexed keywords

CERAMIC COATINGS; MICROMACHINING; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SOL-GELS;

FORCE SENSORS; PIEZOELECTRIC THIN FILMS;

THIN FILMS;

EID: 0031130524     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09453-9     Document Type: Article

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