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Volumn 1, Issue , 2005, Pages 402-407

Optimal control based active force sensing system for micromanipulation

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CANTILEVER BEAMS; ELECTRIC POTENTIAL; FLUORINE COMPOUNDS; FORCE CONTROL; MICROELECTRONICS; SENSORS;

EID: 27644591555     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (5)

References (12)
  • 5
    • 0033338026 scopus 로고    scopus 로고
    • Working equations for piezoelectric actuators and sensors
    • M. S. Weinberg, Working Equations for Piezoelectric Actuators and Sensors, IEEE Journal of Microelectromechanical Systems, Vol. 8, no. 4, pp. 529-533, 1999.
    • (1999) IEEE Journal of Microelectromechanical Systems , vol.8 , Issue.4 , pp. 529-533
    • Weinberg, M.S.1
  • 6
    • 0031235285 scopus 로고    scopus 로고
    • Modeling and optimal design of piezoelectric cantilever microactuators
    • D. L. DeVoe and A. P. Pisano, Modeling and Optimal Design of Piezoelectric Cantilever Microactuators, IEEE Journal of Microelectromechanical Systems, Vol. 6, no. 3, pp. 266-270, 1997.
    • (1997) IEEE Journal of Microelectromechanical Systems , vol.6 , Issue.3 , pp. 266-270
    • DeVoe, D.L.1    Pisano, A.P.2
  • 7
    • 0041888226 scopus 로고    scopus 로고
    • Matched piezoelectric double sensor/actuator pairs for beam motion control
    • Y. Lee, S. J. Elliot, and P. Gardonio, Matched Piezoelectric Double Sensor/Actuator Pairs for Beam Motion Control, Smart Materials and Structures, Vol. 12, pp. 541-548, 2003.
    • (2003) Smart Materials and Structures , vol.12 , pp. 541-548
    • Lee, Y.1    Elliot, S.J.2    Gardonio, P.3
  • 8
    • 0027875540 scopus 로고
    • Distributed controllers for flexible structures using piezoelectric actuator/sensors
    • F. Pourki, Distributed Controllers for Flexible Structures Using Piezoelectric Actuator/Sensors, Proceedings of the 32nd IEEE Conference on Decision and Control, pp. 1367-1370, 1993.
    • (1993) Proceedings of the 32nd IEEE Conference on Decision and Control , pp. 1367-1370
    • Pourki, F.1
  • 10
    • 0004048477 scopus 로고
    • An american national standard: IEEE standard on piezoelectricity
    • An American National Standard: IEEE Standard on Piezoelectricity, ANS/IEEE Standard 176-1987, 1987.
    • (1987) ANS/IEEE Standard , vol.176 , Issue.1987
  • 12
    • 0022128698 scopus 로고
    • Distributed piezoelectric-polymer active vibration control of a cantilever beam
    • T. Bailey and J. E. Hubbard Jr., Distributed Piezoelectric-polymer Active Vibration Control of a Cantilever Beam, Journal of Guidance, Vol. 8, no. 5, pp. 605-611, 1986.
    • (1986) Journal of Guidance , vol.8 , Issue.5 , pp. 605-611
    • Bailey, T.1    Hubbard Jr., J.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.