Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

Microsystem Technologies

Volumn 12, Issue 4, 2006, Pages 335-342

  Liu, Mengwei ^a   Tong, Jianhua ^a   Wang, Liding ^a   Cui, Tianhong ^a,b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEFLECTION (STRUCTURES); MATHEMATICAL MODELS; OPTIMIZATION; SENSORS;

ANALYTICAL MODELS; MULTIPORPH MICROCANTILEVERS; PIEZOELECTRIC MICROCANTILEVERS; TIP DEFLECTION;

PIEZOELECTRIC DEVICES;

EID: 33644537660     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0062-2     Document Type: Article

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