Effect of bottom electrodes on microstructures and electrical properties of sol-gel derived Pb(Zr0.53 Ti0.47)O3 thin films

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 66-71

  Wang, Zhan Jie ^a   Chu, Jia Ru ^b   Maeda, Ryotaro ^c   Kokawa, Hiroyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Crystallization; Electron microscopy; Ferroelectric properties; Interface

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; ELECTRODES; FERROELECTRICITY; HIGH RESOLUTION ELECTRON MICROSCOPY; HYSTERESIS; IRIDIUM COMPOUNDS; LEAD COMPOUNDS; MICROSTRUCTURE; PEROVSKITE; POLARIZATION; SOL-GELS; SPIN COATING; SURFACES;

BOTTOM ELECTRODES;

THIN FILMS;

EID: 0037009690     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00723-X     Document Type: Article

References (22)

1. Maeda R., Wang Z.J., Chu J., Akedo J., Ichiki M., Yonekubo S. Jpn. J. Appl. Phys. 37:1998;7116.
2. Schroth A., Maeda R., Akedo J., Ichiki M. Jpn. J. Appl. Phys. 37:1998;5342.
3. Schroth A., Lee C., Matsumoto S., Maeda R. Sensors Actuators. 73:1999;152.
4. Chu J., Wang Z.J., Maeda R., Kataoka K., Itoh T., Suga T. J. Vac. Sci. Technol. B18:2000;3604.
5. Chu J., Wang Z.J., Maeda R. Jpn. J. Appl. Phys. 38:1999;L1482.
6. Madsen L.D., Weaver L. J. Electron. Mater. 21:1992;93.
7. Kondo I., Yoneyama T., Takenaka O. J. Vac. Sci. Technol. A. 10:1992;3456.
8. Wang Z.J., Maeda R., Kikuchi K. T. IEE Jpn. 119E:1999;254.
9. Nakamura T., Nakao Y., Kamisawa A., Takasu H. Appl. Phys. Lett. 65:1994;1522.
10. Aoki K., Fukuda Y., Numata K., Nishimura A. Jpn. J. Appl. Phys. 38:1995;5250.
11. Shimizu M., Fujisawa H., Hyodo S., Nakashima S., Niu H. Mat. Res. Soc. Symp. Proc. 493:1998;159.
12. Jaffe B., Cook W.R. Jr., Jaffe H. Piezoelectric Ceramics. 1971;Academic Press, New York, NY.
13. Powder Diffraction File, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, PA, Card No. 15-870.
14. Jeon Y.-C., Seon J.-M., Joo J.-H., Oh K.-Y., Roh J.-S., Kim J.-J., Kim D.-S. Appl. Phys. Lett. 71:1997;467.
15. Wang Z.J., Maeda R., Kikuchi K. J. Jpn. Inst. Metals. 64:2000;383.
16. Wang Z.J., Maeda R., Kikuchi K. Jpn. J. Appl. Phys. 38:1999;5342.
17. Wang Z.J., Kikuchi K., Maeda R. Jpn. J. Appl. Phys. 39:2000;5413.
18. Wang Z.J., Maeda R., Ichiki M., Kokawa H. Jpn. J. Appl. Phys. 40:2001;5523.
19. Tuttle B.A., Headley T.J., Bunker B.C., Schwartz R.W., Zender T.J., Hernadez C.L., Goodnow D.C., Tissot R.J., Michel J., Carim A.H. J. Mater. Res. 7:1992;1876.
20. Chen S.Y., Chen I.W. J. Am. Ceram. Soc. 77:1994;2332.
21. Wang Z.J., Maeda R., Kikuchi K. J. Mater. Sci. 35:2000;5915.
22. Lee K.B., Tirumala S., Desu S.B. Appl. Phys. Lett. 74:1999;1484.