A quantitative method for dual-pass electrostatic force microscopy phase measurements

Surface and Interface Analysis

Volumn 39, Issue 4, 2007, Pages 354-358

  Yan, Minjun ^a   Bernstein, Gary H ^a  

^a University of Notre Dame   (United States)

Author keywords

Electrostatic force microscopy; Force gradient; Kelvin probe force microscopy; Phase measurement

Indexed keywords

ELECTROSTATIC FORCE; FINITE ELEMENT METHOD; PHASE MEASUREMENT; SURFACE CHARGE; SURFACE TOPOGRAPHY; WIRE;

ELECTROSTATIC FORCE GRADIENTS; ELECTROSTATIC FORCE MICROSCOPY (EFM); KELVIN PROBE FORCE MICROSCOPY; PHASE SIGNALS;

MICROSCOPIC EXAMINATION;

EID: 34247158949     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2529     Document Type: Article

References (35)

1. Martin Y, Abraham DW, Wickramasinghe HK. Appl. Phys. Lett. 1988; 52(13): 1103.
2. Sarid D. Scanning Force Microscopy with Applications to Electric, Magnetic and Atomic Force. Oxford University Press: New York, Oxford, 1994.
3. Stern JE, Terris BD, Mamin HJ, Rugar D. Appl. Phys. Lett. 1988; 53(26): 2717.
4. Jespersen TS, Nygard J. Nano Lett. 2005; 5(9): 1838.
5. Schaadt DM, Yu ET, Sankar S, Berkowitz AE. Appl. Phys. Lett. 1999; 74: 472.
6. Guillemot C, Budau P, Chevrier J, Marchi F, Comin F, Alandi C, Bertin F, Buffet N, Wyon Ch, Mur P. Europhys. Lett. 2002; 59:566.
7. Ng CY, Chen T, Lau HW, Liu Y, Tse MS, Tan OK, Lim VSW. Appl. Phys. Lett. 2004; 85: 2941.
8. Jo W. Ultramicroscopy 2005; 105: 299.
9. Kalinin SV, Bonnell DA. Phys. Rev. B 2001; 63: 125411.
10. Sasahara A, Uetsuka H, Onishi H, Phys. Rev. B 2001; 64: 121406(R).
11. Klein L, Williams C. Appl. Phys. Lett. 2002; 81: 4589.
12. Woodside M, McEuen P. Science 2001; 296: 1098.
13. Stomp R, Miyahara Y, Schaer S, Sun Q, Guo H, Grutter P. Phys. Rev. Lett. 2005; 94: 056802.
14. Paris DT, Hurd FK. Basic Electromagnetic Theory. McGraw-Hill Inc.: New York, 1969.
15. Belaidi S, Girard P, Leveque G. J. Appl. Phys. 1997; 81(3): 1023.
16. Terris BD, Stern JE, Rugar D, Mamin HJ. Phys. Rev. Lett. 1989; 63(24): 2669.
17. Hao H, Baro AM, Saenz JJ. J. Vac. Sci. Technol. B 1991; 9(2): 1323.
18. Colchero J, Gil A, Baro AM. Phys. Rev. B 2001; 64: 245403.
19. Law M, Rieutord F. Phys. Rev. B 2002; 66: 035402.
20. Hudlet S, Saint Jean M, Guthmann C, Berger J. Eur. Phys. J. B 1998; 2: 5.
21. Belaidi S, Lebon F, Girard P, Leveque G, Pagano S. Appl. Phys. A 1998; 66: S239.
22. Gross TS, Prindle CM, Chamberlin K, Kamsah NB, Wu Y. Ultramicroscopy 2001; 87: 147.
23. Lambert J, Guthmann C, Saint-Jean M. J. Appl Phys. 2003; 93: 5369.
24. Sadewasser S, Lux-Steiner MC. Phys. Rev, Lett. 2003; 91: 266101.
25. Yan M, Bernstein GH. Ultramicroscopy 2006; 106: 582.
26. Magonov SN, Elings V, Whangbo MH. Surf. Sci. 1997; 375: L385.
27. Lei CH, Das A, Elliott M, Macdonald JE. Nanotechnology 2004; 15: 627.
28. Staii C, Johson AT Jr, Pinto NJ. Nano Lett. 2004; 4(5): 859.
29. de Pablo PJ, Colchero J, Luna M, Gomez-Herrero J, Baro AM. Phys. Rev. B 2000; 61(20): 14179.
30. Gil A, Colchero J, Gomez-Herrero J, Baro AM. Nanotechnology 2003; 14: 332.
31. FEMLAB 3.0 Electrostatics Module, COMSOL Inc. http://www.comsol.com/.
32. Cleveland JP, Manne S, Bocek D, Hansma PK. Rev. Sci. Instrum. 1993; 64(2): 403.
33. Sader JE, Larson I, Mulvaney P, White LR. Rev. Sci. Instrum. 1995; 66(7): 3789.
34. Chen GY, Warmack RJ, Huang A, Thunder T. J. Appl. Phys. 1995; 78(3): 1465.
35. Gibson CT, Weeks BL, Lee JRI, Abell C, Rayment T. Rev. Sci. Instrum. 2001; 72(5): 2340.