Studying the effect of deposition conditions on the performance and reliability of MEMS gas sensors

Sensors

Volumn 7, Issue 3, 2007, Pages 319-340

  Sadek, Khaled ^a   Moussa, Walied ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Computational cost; Fatigue; High performance multiphysics computation; MEMS gas sensors; Microfabrication; Nonlinearity; Reliability; Sensitivity

Indexed keywords

CHEMICAL SENSORS; COST BENEFIT ANALYSIS; DECISION MAKING; DEPOSITION; FATIGUE OF MATERIALS; FINITE ELEMENT METHOD; GAS DETECTORS; GASES; MICROANALYSIS; MICROFABRICATION; RELIABILITY; RELIABILITY ANALYSIS;

COMPUTATIONAL COSTS; MECHANICAL CHARACTERISTICS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MULTI-PHYSICS COMPUTATION; NONLINEARITY; OPTIMUM OPERATION CONDITIONS; PERFORMANCE AND RELIABILITIES; SENSITIVITY;

MEMS;

EID: 34047180979     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7030319     Document Type: Article

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