High-cycle fatigue of micron-scale polycrystalline silicon films: Fracture mechanics analyses of the role of the silica/silicon interface

International Journal of Fracture

Volumn 120, Issue 1-2, 2003, Pages 449-474

  Muhlstein, C L ^a   Ritchie, R O ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Fatigue; MEMS; Silicon; Thin films

Indexed keywords

CRACK PROPAGATION; FRACTURE TOUGHNESS; POLYCRYSTALLINE MATERIALS; SILICON; THIN FILMS;

CRITICAL GEOMETRY;

FATIGUE OF MATERIALS;

FRACTURE MECHANICS;

EID: 0141482405     PISSN: 03769429     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1024988031390     Document Type: Article

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