Stresses and deformation processes in thin films on substrates

Critical Reviews in Solid State and Materials Sciences

Volumn 14, Issue 3, 1988, Pages 225-268

  Doerner, Mary F ^a   Nix, William D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS--MECHANICAL PROPERTIES; SEMICONDUCTING FILMS--STRESSES; STRESSES--THERMAL EFFECTS;

ANISOTROPIC ELASTICITY; ELASTIC ISOTROPY; THIN FILMS DEFORMATION; THIN FILMS ON SUBSTRATES; THIN FILMS STRESSES;

SOLID STATE DEVICES, THIN FILM;

EID: 0024129196     PISSN: 10408436     EISSN: 15476561     Source Type: Journal    
DOI: 10.1080/10408438808243734     Document Type: Article

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