Investigating the effect of deposition variation on the performance sensitivity of low-power gas sensors

Sensors and Actuators, B: Chemical

Volumn 107, Issue 2, 2005, Pages 497-508

  Sadek, K ^a   Moussa, W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Computational cost; Gas microsensors; Manufacturing tolerance; Multilevel substructuring; Non linearity; Sensitivity

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTATIONAL METHODS; COSTS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; FINITE ELEMENT METHOD; MICROMACHINING; PERFORMANCE; THERMAL CONDUCTIVITY; THIN FILMS; THREE DIMENSIONAL;

COMPUTATIONAL COSTS; GAS MICROSENSORS; MANUFACTURING TOLERANCE; MULTILEVEL SUBSTRUCTURING; NON-LINEARITY; SENSITIVITY;

CHEMICAL SENSORS;

EID: 18544375907     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.11.008     Document Type: Article

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