AlGaN ultraviolet metal-semiconductor-metal photodetectors grown on Si substrates

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 502-506

  Chang, S J ^a   Ko, T K ^a   Sheu, J K ^a   Shei, S C ^b   Lai, W C ^a   Chiou, Y Z ^c   Lin, Y C ^a   Chang, C S ^d   Chen, W S ^a   Shen, C F ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF TAINAN   (Taiwan)

^c SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^d Epitech Technology Corporation   (Taiwan)

Author keywords

AlGaN; MSM; Photodetectors; Si substrates; UV

Indexed keywords

ALUMINUM COMPOUNDS; DARK CURRENTS; LOW TEMPERATURE EFFECTS; SEMICONDUCTOR GROWTH; SILICON; SUBSTRATES;

ALGAN; CAP LAYER; MSM; SI SUBSTRATES;

ULTRAVIOLET DETECTORS;

EID: 34047132930     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.017     Document Type: Article

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