Low-temperature polycrystalline silicon thin-film flash memory with hafnium silicate

IEEE Transactions on Electron Devices

Volumn 54, Issue 3, 2007, Pages 531-536

  Lin, Yu Hsien ^a   Chien, Chao Hsin ^a,b   Chou, Tung Huan ^a   Chao, Tien Sheng ^a   Lei, Tan Fu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Flash memory; Hafnium silicate; Nonvolatile memories; Polycrystalline silicon thin film transistor (poly Si TFT)

Indexed keywords

GRAIN BOUNDARIES; HAFNIUM COMPOUNDS; NONVOLATILE STORAGE; POLYSILICON; THIN FILM TRANSISTORS;

LOW-THERMAL BUDGET PROCESSING; POLYCRYSTALLINE SILICON THIN-FILM TRANSISTOR;

FLASH MEMORY;

EID: 33947706731     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.890379     Document Type: Article

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