3D TFT-SONOS Memory Cell for Ultra-High Density File Storage Applications

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2003, Pages 29-30

  Walker, Andrew J ^a   Nallamothu, Sucheta ^a   Chen, En Hsing ^a   Mahajani, Maitreyee ^a   Brad Herner, S ^a   Clark, Mark ^b   Cleeves, James M ^a   Vance Dunton, S ^a   Eckert, Victoria L ^a   Gu, James ^a   Hu, Susan ^a   Knall, Johan ^a   Konevecki, Michael ^a   Petti, Christopher ^a   Radigan, Steven ^a   Raghurarn, Usha ^a   Vienna, Joetta ^a   Vyvoda, Michael A ^a  

^a Matrix Semiconductor   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

3D; Memory; Nonvolatile; SONOS; TFT

Indexed keywords

POLYSILICON; SINGLE CRYSTALS; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE; TRANSMISSION ELECTRON MICROSCOPY; CELLS; MEMORY ARCHITECTURE; NONVOLATILE STORAGE; SEMICONDUCTOR STORAGE; SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS;

MEMORY DENSITIES;

FLASH MEMORY; CYTOLOGY;

3D; C. THIN FILM TRANSISTOR (TFT); FILE STORAGE; LOW POWER; MEMORY CELL; NONVOLATILE; SILICON-OXIDE-NITRIDE-OXIDE-SILICON MEMORY; SONOS; TFT; ULTRAHIGH DENSITY;

EID: 0141426842     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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