Damage production in semiconductor materials by a focused Ga+ ion beam

Journal of Applied Physics

Volumn 88, Issue 10, 2000, Pages 5658-5661

  Menzel, R ^a   Gartner K ^a   Wesch, W ^a   Hobert, H ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001303406     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1319168     Document Type: Article

References (15)

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