Accuracy of the spring constant of atomic force microscopy cantilevers by finite element method

Analytical Chemistry

Volumn 79, Issue 4, 2007, Pages 1333-1338

  Chen, Bo Yi ^a   Yeh, Meng Kao ^a   Tai, Nyan Hwa ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMS; ERROR ANALYSIS; FINITE ELEMENT METHOD; MOLECULES; POISSON RATIO;

CANTILEVER GEOMETRIES; IMAGE TIP MASS; SPRING CONSTANT; TILT ANGLE;

CHEMICAL BONDS;

SILICON; SILICON NITRIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CERAMICS; ENERGY; FINITE ELEMENT ANALYSIS; GEOMETRY; LOADING TEST; MATERIALS; MATHEMATICAL ANALYSIS; MEASUREMENT; POISSON DISTRIBUTION; SCANNING ELECTRON MICROSCOPY; YOUNG MODULUS;

EID: 33847241863     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac061380v     Document Type: Article

References (23)

1. Binnig, G.; Rohrer, H.; Gerber, C. H.; Weibel, E. Appl. Phys. Lett. 1982, 40, 178-180.
2. Binnig, G.; Quate, C. F. Phys. Rev. Lett. 1986, 56, 930-933.
3. Poggi, M. A.; Gadsby, E. D.; Bottomley, L. A.; King, W. P.; Oroudjev, E, Hansma, H. Anal. Chem. 2004, 76, 3429-3444.
4. Jin, Y.; Wang, K.; Tan, W.; Wu, P.; Wang, Q.; Huang, H.; Huang, S.; Tang, Z.; Guo, Q. Anal. Chem. 2004, 76, 5721-5725.
5. Skulason, H.; Frisbie, C. D. Anal Chem. 2002, 74, 3096-3104.
6. Kühner, F.; Costa, L. T.; Bisch, P. M.; Thalhammer, S.; Heckl, W. M.; Gaub, H. E. Biophys. J. 2004, 87, 2683-2690.
7. Yu, M. F.; Lourie, O.; Dyer, M. J.; Moloni, K.; Kelly, T. F.; Ruoff, R. S. Science 2000, 287, 637-640.
8. Poggi, M. A.; McFarland, A. W.; Colton, J. S.; Bottomley, L. A. Anal. Chem. 2005, 77, 1192-1195.
9. Sader, J. E. Rev. Sci. Instrum. 2003, 74, 2438-2443.
10. Sader, J. E.; White, L. J. Appl. Phys. 1993, 74, 1-9.
11. Sader, J. E.; Larson, I.; Mulvaney, P.; White L. R. Rev. Sci. Instrum. 1995, 66, 3789-3798.
12. Neumeister, J. M.; Ducker, W. A. Rev. Sci. Instrum. 1994, 65, 2527-2531.
13. Heim, L. O.; Kappl, M.; Butt, H. J. Langmuir 2004, 20, 2760-2764.
14. Cleveland, J. P.; Manne, S.; Bocek, D.; Hansma, P. K. Rev. Sci. Instrum. 1993, 64, 403-405.
15. Sader, J. E.; Chon, J. W. M.; Mulvaney, P. Rev. Sci. Instrum. 1999, 70, 3967-3969.
16. Gibson, C. T.; Weeks, B. L.; Lee, J. R. I.; Abell, C.; Raiment, T. Rev. Sci. Instrum. 2001, 72, 2340-2343.
17. Yeh, M. K.; Chen, B. Y.; Tai, N. H.; Chiu, C. C. Key Eng. Mater. 2006, 326-328, 377-380.
18. Cumpson, P. J.; Zhdan, P.; Hedley, J. Ultramicroscopy 2004, 100, 241-251.
19. Cumpson, P. J.; Hedley, J.; Clifford, C. A. J. Vac. Sci. Technol., B 2005, 23, 1992-1997.
20. Curapson, P. J.; Hedley, J. Nanotechnology 2003, 14, 1279-1288.
21. Stark, R. W.; Drobek, T.; Heckl, W. M. Ultramicroscopy 2001, 100, 207-215.
22. Lin, M. C.; Yeh, M. K. AIAA J. 1995, 33, 1728-1733.
23. Xie, S.; Li, W.; Pan, Z.; Chang, B.; Sun, L. J. Phys. Chem. Solids 2000, 61, 1153-1158.