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Volumn 326-328 I, Issue , 2006, Pages 377-380
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Force measurement by AFM cantilever with different coating layers
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Author keywords
Atomic force microscopy; Coating layers; Finite element method; Spring constant
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FINITE ELEMENT METHOD;
NANOSTRUCTURED MATERIALS;
NUMERICAL METHODS;
PROTECTIVE COATINGS;
THICKNESS MEASUREMENT;
CANTILEVERS;
COATING LAYERS;
SIGNAL INTENSITY;
SPRING CONSTANT;
FORCE MEASUREMENT;
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EID: 33751530070
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: 10.4028/0-87849-415-4.377 Document Type: Conference Paper |
Times cited : (4)
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References (8)
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