Microelectromechanical device for lateral force calibration in the atomic force microscope: Lateral electrical nanobalance

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 5, 2005, Pages 1992-1997

  Cumpson, Peter J ^a   Hedley, John ^b   Clifford, Charles A ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DOPPLER EFFECT; ELECTRIC VARIABLES MEASUREMENT; FRICTION; POLYMERS;

LATERAL ELECTRICAL UNBALANCE (LEU); LATERAL FORCE MICROSCOPY; OPTICAL TWEEZERS;

MICROELECTROMECHANICAL DEVICES;

EID: 31144462498     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2044809     Document Type: Article

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