A method for calculating the spring constant of atomic force microscopy cantilevers with a nonrectangular cross section

Analytical Chemistry

Volumn 77, Issue 4, 2005, Pages 1192-1195

  Poggi, Mark A ^a   McFarland, Andrew W ^b   Colton, Jonathan S ^b   Bottomley, Lawrence A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY CANTILEVERS; CANTILEVER PROBE; CROSS SECTIONS; SPRING CONSTANT;

ASPECT RATIO; CANTILEVER BEAMS; ETCHING; STIFFNESS;

ATOMIC FORCE MICROSCOPY;

ARTICLE; ATOMIC FORCE MICROSCOPY; DYNAMICS; GEOMETRY; MATHEMATICAL MODEL; RIGIDITY; TECHNIQUE;

MATHEMATICS; MICROSCOPY, ATOMIC FORCE;

EID: 13844314228     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac048828h     Document Type: Article

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17. Thermal spectra were acquired using a Nanoscope IIIa (Veeco Metrology, Santa Barbara, CA) scanning probe microscope with extender electronics. The raw cantilever motion/deflection and the piezoscanner drive voltages were sampled from a Signal Access Module (Veeco Metrology) placed between the extender box and the base of the microscope. Thermal spectra were acquired by feeding the raw cantilever deflection signal to a SRS 785 Dynamic Signal Analyzer using a Blackman-Harris window (Stanford Research Systems). The piezoscanner was calibrated in x, y, and z using NIST certifiedcalibration gratings (MikroMasch).