Analysis of electronic structure of high-k films by using STEM-EELS

ECS Transactions

Volumn 3, Issue 3, 2006, Pages 143-152

  Ikarashi, Nobuyuki ^a   Manabe, Kenzo ^a   Takahashi, Kensuke ^a   Saitoh, Motofumi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; ENERGY GAP; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

BANDGAP; CONCENTRATION DEPENDENCY; INITIO ELECTRONIC STRUCTURE CALCULATIONS; SCANNING TRANSMISSION ELECTRON MICROSCOPE (STEM-EELS);

THIN FILMS;

EID: 33846958823     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2355706     Document Type: Conference Paper

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