Non-conservative electron transport in CF4 in electric and magnetic fields crossed at arbitrary angles

Journal of Physics D: Applied Physics

Volumn 39, Issue 22, 2006, Pages 4788-4798

  Dujko, S ^a,b   White, R D ^a   Ness, K F ^a   Petrovic Z Lj ^b   Robson, R E ^a  

^a JAMES COOK UNIVERSITY   (Australia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; FLUORINE COMPOUNDS; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELD EFFECTS; MAGNETRONS; MONTE CARLO METHODS;

CARBON TETRAFLUORIDE; DRIFT VELOCITY; FLUID MODELS; MAGNETIC FIELD STRENGTH; TRANSPORT COEFFICIENTS;

ELECTRON TRANSPORT PROPERTIES;

EID: 33846862473     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/22/009     Document Type: Article

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