Harmonic content of electron-impact source functions in inductively coupled plasmas using an "on-the-fly" Monte Carlo technique

Journal of Applied Physics

Volumn 92, Issue 2, 2002, Pages 736-748

  Sankaran, Arvind ^a   Kushner, Mark J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL BURDEN; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON-IMPACT; EVEN-HARMONIC; HARMONIC COMPONENTS; HARMONIC CONTENTS; ICP SYSTEMS; LOW PRESSURES; MONTE CARLO TECHNIQUES; NONLOCAL TRANSPORT; ON-THE-FLY; PLASMA PARAMETER; PSEUDO-PARTICLES; RADIO FREQUENCIES; SOURCE FUNCTIONS; TIME DEPENDENCE; TIME-DEPENDENT; TWO-DIMENSIONAL PLASMA;

ELECTRON TEMPERATURE; HARMONIC ANALYSIS; INDUCTIVELY COUPLED PLASMA; LORENTZ FORCE; MONTE CARLO METHODS; OPTICAL TRANSFER FUNCTION;

HARMONIC FUNCTIONS;

EID: 0037101021     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1487455     Document Type: Article

References (26)

1. J. T. C. Lee, N. Layadi, K. V. Guinn, H. L. Maynard, F. P. Klemens, D. E. Ibbotson, I. Tepermeister, P. O. Egan, and R. A. Richardson, J. Vac. Sci. Technol. A 14, 2510 (1996). jva JVTAD6 0734-2101
2. G. diPeso, V. Vahedi, D. Hewitt, and T. Rognlien, J. Vac. Sci. Technol. A 12, 1387 (1994). jva JVTAD6 0734-2101
3. C. Lee, D. B. Graves, M. A. Lieberman, and D. W. Hess, J. Electrochem. Soc. 141, 1546 (1994). jes JESOAN 0013-4651
4. J. K. Lee, L. Meng, Y. K. Shin, H. J. Lee, and T. H. Chung, Jpn. J. Appl. Phys. 36, 5714 (1997). jjb JAPNDE 0021-4922
5. I. D. Kagnovich, B. N. Ramamruthi, and D. J. Economou, Phys. Rev. E 64, 036402 (2001). pre PLEEE8 1063-651X
6. E. Meeks, P. Ho, A. Ting, and R. J. Buss, J. Vac. Sci. Technol. A 16, 2227 (1998). jva JVTAD6 0734-2101
7. J. T. Gudmundsson, T. Kimura, and M. A. Lieberman, Plasma Sources Sci. Technol. 8, 22 (1999). pst PSTEEU 0963-0252
8. M. Tadokoro, H. Hirata, N. Nakano, Z. L. Petrovic, and T. Makabe, Phys. Rev. E 57, 43 (1998). pre PLEEE8 1063-651X
9. K. Hou, S. Nakagarni, and T. Makabe, Thin Solid Films 386, 239 (2001). tsf THSFAP 0040-6090
10. J.-S. Oh and T. Makabe, Jpn. J. Appl. Phys. 39, 1358 (2000). jjb JAPLD8 0021-4922
11. V. A. Godyak, B. Alexandrovich, and V. I. Kolobov, Phys. Rev. E 64, 026406 (2001). pre PLEEE8 1063-651X
12. D. B. Graves, J. Appl. Phys. 62, 88 (1987). jap JAPIAU 0021-8979
13. T. J. Sommerer, W. N. G. Hitchon, and J. E. Lawler, Phys. Rev. Lett. 63, 2361 (1989). prl PRLTAO 0031-9007
14. M. Meyyappan and T. R. Govindan, IEEE Trans. Plasma Sci. PS-19, 122 (1991). tps ITPSBD 0093-3813
15. M. Surendra, D. B. Graves, and I. J. Morey, Appl. Phys. Lett. 56, 1022 (1990). apl APPLAB 0003-6951
16. Z. L. Pertovic, F. Tochikubo, S. Kakuta, and T. Makabe, J. Appl. Phys. 73, 2163 (1993). jap JAPIAU 0021-8979
17. V. A. Godyak, Bulg. J. Phys. 27, 13 (2000). bul BJPHD5 0323-9217
18. V. A. Godyak, B. Alexandrovich, R. Piejak, and A. Smolyakov, Plasma Sources Sci. Technol. 9, 541 (2000). pst PSTEEU 0963-0252
19. R. H. Cohen and T. D. Rognlien, Plasma Sources Sci. Technol. 5, 442 (1996). pst PSTEEU 0963-0252
20. V. A. Godyak, R. Piejak, B. Alexandrovich, and A. Smolyakov, Plasma Sources Sci. Technol. 10, 459 (2001). pst PSTEEU 0963-0252
21. R. B. Piejak and V. A. Godyak, Appl. Phys. Lett. 76, 2188 (2000). apl APPLAB 0003-6951
22. R. Kinder and M. J. Kushner, J. Vac. Sci. Technol. A 19, 76 (2001). jva JVTAD6 0734-2101
23. R. Kinder and M. J. Kushner, J. Appl. Phys. 90, 3699 (2001). jap JAPIAU 0021-8979
24. C. K. Birdsall and A. B. Langdon, Plasma Physics by Computer Simulation (McGraw-Hill, New York, 1985), Sec. 8-5.
25. N. A. Krall and A. W. Trivelpiece, Principles of Plasma Physics (San Francisco Press, San Francisco, 1986), p. 152.
26. M. J. Pinheiro, G. Gousset, A. Granier, and C. M. Ferreira, Plasma Sources Sci. Technol. 7, 524 (1998). pst PSTEEU 0963-0252