Angular anisotropy of electron energy distributions in inductively coupled plasmas

Journal of Applied Physics

Volumn 94, Issue 9, 2003, Pages 5522-5529

  Vasenkov, Alex V ^a,b   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b CFD RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHARGE TRANSFER; COMPUTER SIMULATION; FREQUENCIES; MONTE CARLO METHODS; POISSON EQUATION; POLYNOMIALS;

ANGLE-DEPENDENT ELECTRON ENERGY DISTRIBUTIONS (AEED); ANGULAR ANISOTROPY;

INDUCTIVELY COUPLED PLASMA;

EID: 0242552148     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1614428     Document Type: Article

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