SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of the Korean Physical Society

Volumn 49, Issue SUPPL. 3, 2006, Pages

A study on interface layer with annealing conditions of ZrO 2/ZrSixOy high-k gate oxide

(2) Kim, H D a Roh, Y b

a Sunic System Ltd (South Korea)

b Sungkyunkwan University (South Korea)

Author keywords

Gate oxide; High k; ZrO2; ZrSixOy

Indexed keywords

EID: 33846348347 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (16)

References (19)

1
- 0031140151
- K. S. Tang, W. S. Lau and G. S. Samudra, IEEE Circuits Devices Mag. 13, 27 (1997).
- (1997) IEEE Circuits Devices Mag , vol.13 , pp. 27
- Tang, K.S.¹ Lau, W.S.² Samudra, G.S.³

2
- 0001339749
- G. B. Alers, R. M. Fleming, Y. H. Wong, B. Dennis, A. Pinczuk, G. Redinho, R. Urdahl, E. Ong and S. Hasan, Appl. Phys. Lett. 72, 1308 (1998).
- (1998) Appl. Phys. Lett , vol.72 , pp. 1308
- Alers, G.B.¹ Fleming, R.M.² Wong, Y.H.³ Dennis, B.⁴ Pinczuk, A.⁵ Redinho, G.⁶ Urdahl, R.⁷ Ong, E.⁸ Hasan, S.⁹

3
- 0032072478
- C. Chaneliere, J. L. Autran, R. A. B. Devine and B. Balland, Mater. Sci. Eng. R 22, 269 (1998).
- (1998) Mater. Sci. Eng. R , vol.22 , pp. 269
- Chaneliere, C.¹ Autran, J.L.² Devine, R.A.B.³ Balland, B.⁴

4
- 0001459359
- T. S. Jeon, J. M. White and D. L. Kwong, Appl. Phys. Lett. 78, 368 (2001).
- (2001) Appl. Phys. Lett , vol.78 , pp. 368
- Jeon, T.S.¹ White, J.M.² Kwong, D.L.³

5
- 0035883789
- J. P. Chang and Y.-S. Lin, J. Appl. Phys. 90, 2964 (2001).
- (2001) J. Appl. Phys , vol.90 , pp. 2964
- Chang, J.P.¹ Lin, Y.-S.²

6
- 79955987445
- B. K. Park, J. Park, M. Cho, C. S. Hwang, K. Oh, Y. Han and D. Y. Yang, Appl. Phys. Lett. 80, 2368 (2002).
- (2002) Appl. Phys. Lett , vol.80 , pp. 2368
- Park, B.K.¹ Park, J.² Cho, M.³ Hwang, C.S.⁴ Oh, K.⁵ Han, Y.⁶ Yang, D.Y.⁷

7
- 0000361018
- B. H. Lee, L. Kang, R. Nieh, W. Qi and J. C. Lee, Appl. Phys. Lett. 76, 1926 (2000).
- (2000) Appl. Phys. Lett , vol.76 , pp. 1926
- Lee, B.H.¹ Kang, L.² Nieh, R.³ Qi, W.⁴ Lee, J.C.⁵

8
- 0000551766
- G. D. Wilk and R. M. Wallace, Appl. Phys. Lett. 74, 2854 (1999).
- (1999) Appl. Phys. Lett , vol.74 , pp. 2854
- Wilk, G.D.¹ Wallace, R.M.²

9
- 0346534582
- G. D. Wilk, R. M. Wallace and J. M. Anthony, J. Appl. Phys. 87, 484 (2000).
- (2000) J. Appl. Phys , vol.87 , pp. 484
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

10
- 33846400789
- W. Qi, R. Nieh, B. H. Lee, L. Kang, Y. Jeon, K. Onishi, T. Ngai, S. Banerjee and J. C. Lee, IEDM, 145 (1999).
- (1999) IEDM , vol.145
- Qi, W.¹ Nieh, R.² Lee, B.H.³ Kang, L.⁴ Jeon, Y.⁵ Onishi, K.⁶ Ngai, T.⁷ Banerjee, S.⁸ Lee, J.C.⁹

11
- 0000780316
- W. Qi, R. Nieh, E. Dharmarajan, B. H. Lee, Y. Jeon, L. Kang, K. Onishi and J. C. Lee. Appl. Phys. Lett. 77, 1704 (2000).
- (2000) Appl. Phys. Lett , vol.77 , pp. 1704
- Qi, W.¹ Nieh, R.² Dharmarajan, E.³ Lee, B.H.⁴ Jeon, Y.⁵ Kang, L.⁶ Onishi, K.⁷ Lee, J.C.⁸

12
- 0038939581
- to be submitted
- H. D. Kim, S. H. Jeong, J. Kim, Y. Roh, H.-B. Kang, C.-W. Yang and N.-E. Lee, Appl. Phys. Lett. (to be submitted).
- Appl. Phys. Lett
- Kim, H.D.¹ Jeong, S.H.² Kim, J.³ Roh, Y.⁴ Kang, H.-B.⁵ Yang, C.-W.⁶ Lee, N.-E.⁷

13
- 12744251570
- W. J. Choi, E. J. Lee, K. S. Yoon, J. Y. Yang, J. H. Lee, C. O. Kim and J. P. Hong, J. Korean Phys. Soc. 45, 716 (2004).
- (2004) J. Korean Phys. Soc , vol.45 , pp. 716
- Choi, W.J.¹ Lee, E.J.² Yoon, K.S.³ Yang, J.Y.⁴ Lee, J.H.⁵ Kim, C.O.⁶ Hong, J.P.⁷

14
- 33846338519
- Katsuyuki Sekine, Seiji Inumiya, Motoyuki Sato, Akio Kaneko, Kazuhiro Eguchi and Yoshitaka Tsunashima, IEDM. Tech. Dig, 103 (2003).
- (2003) IEDM. Tech. Dig , vol.103
- Sekine, K.¹ Inumiya, S.² Sato, M.³ Kaneko, A.⁴ Eguchi, K.⁵ Tsunashima, Y.⁶

15
- 33846367072
- Masahiro Koike, Tsunehiro Ino, Yuuichi Kamimuta, Masato Koyama, Yoshiki Kamata, Masamichi Suzuki, Yuichiro Mitani, Akira Nishiyama and Yoshitaka Tsunnashima, IEDM. Tech. Dig, 107 (2003).
- (2003) IEDM. Tech. Dig , vol.107
- Koike, M.¹ Ino, T.² Kamimuta, Y.³ Koyama, M.⁴ Kamata, Y.⁵ Suzuki, M.⁶ Mitani, Y.⁷ Nishiyama, A.⁸ Tsunnashima, Y.⁹

16
- 4344610680
- H. D. Kim, Y. Roh and J. E. Lee, J. Vac. Sci. Technol. A 22, 1342 (2004).
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1342
- Kim, H.D.¹ Roh, Y.² Lee, J.E.³

17
- 4344584106
- H. D. Kim, Y. Roh and J. E. Lee, J. Vac. Sci. Technol. A 22, 1347 (2004).
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1347
- Kim, H.D.¹ Roh, Y.² Lee, J.E.³

18
- 3843065430
- E. J. Lee, W. J. Choi, K. S. Yoon, J. Y. Yang, J. H. Lee, C. O. Kim and J. P. Hong, J. Korean Phys. Soc. 45, 166 (2004).
- (2004) J. Korean Phys. Soc , vol.45 , pp. 166
- Lee, E.J.¹ Choi, W.J.² Yoon, K.S.³ Yang, J.Y.⁴ Lee, J.H.⁵ Kim, C.O.⁶ Hong, J.P.⁷

19
- 29344456791
- S
- S.-W. Jeong, K. S. Kim, M. T. You and Y. Roh, J. Korean Phys. Soc. 47, S401 (2005).
- (2005) J. Korean Phys. Soc , vol.47 , pp. 401
- Jeong, S.-W.¹ Kim, K.S.² You, M.T.³ Roh, Y.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.