Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2618-2631

  Nieva, P M ^a   McGruer, N E ^b   Adams, G G ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOCHROMATORS; SENSORS; THIN FILMS; VIBRATION MEASUREMENT;

FABRY-PEROT VIBRATION SENSOR; MECHANICAL TRANSFER FUNCTION; MICROMACHINED CAVITIES; THIN FILM CANTILEVER BEAMS;

PRODUCT DEVELOPMENT;

EID: 33846102060     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/015     Document Type: Article

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