Air viscous damping effects in vibrating microbeams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6169, Issue , 2006, Pages

  Nieva, P M ^a   McGruer, N E ^b   Adams, G G ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

Air flow damping; MEMS interferometry; Squeeze film damping; Vibrating microbeams; Viscous damping

Indexed keywords

CANTILEVER BEAMS; INTERFEROMETRY; ISOTHERMS; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS; REYNOLDS NUMBER; SWITCHING; THIN FILMS; VISCOSITY;

AIR-FLOW DAMPING; MEMS INTERFEROMETRY; SQUEEZE-FILM DAMPING; VIBRATING MICROBEAMS; VISCOUS DAMPING;

DAMPING;

EID: 33745807602     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658829     Document Type: Conference Paper

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