Silicon carbide membrane relative humidity sensor with aluminium electrodes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 193-196

  Connolly, E J ^a   Pham, Htm ^a   Groeneweg, J ^a   Sarro, P M ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC CURRENT; ANODIZATION; SHADOW MASKS;

ATMOSPHERIC HUMIDITY; DOPING (ADDITIVES); ELECTRODES; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SILICON CARBIDE;

SENSORS;

EID: 3042738007     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2003.1189719     Document Type: Conference Paper

References (11)

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