Theoretical and experimental study on airflow damping of vibrating microcantilevers

Journal of Vibration and Acoustics, Transactions of the ASME

Volumn 121, Issue 1, 1999, Pages 64-69

  Hosaka, H ^a,b   Itao, K ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MECHANISMS; NAVIER STOKES EQUATIONS;

AIRFLOW DAMPING; MICROCANTILEVERS;

VIBRATIONS (MECHANICAL);

EID: 0032762357     PISSN: 10489002     EISSN: 15288927     Source Type: Journal    
DOI: 10.1115/1.2893949     Document Type: Article

References (13)

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