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Applied Physics Letters

Volumn 81, Issue 18, 2002, Pages 3320-3322

Micromachined Fabry-Perot interferometer for motion detection

(2) Waters, Richard L a Aklufi, Monti E a

a Naval Command (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DEVICES; HIGHLY SENSITIVE; MICROMACHINED; MICROMACHINING TECHNIQUES; MONOLITHIC INTEGRATION; MOTION DETECTION; OPTICAL CAVITIES; OPTICAL POWER; OUTPUT RESISTANCE; PARASITIC ELEMENT; PROOF MASS; SILICON PHOTODIODE; SUPPORT STRUCTURES; TRANSDUCTION METHOD; VOLTAGE AMPLIFICATION;

AMPLIFICATION; BACTERIOPHAGES; ELECTRIC RESISTANCE; HETEROJUNCTION BIPOLAR TRANSISTORS; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; SIGNAL TRANSDUCTION;

FABRY-PEROT INTERFEROMETERS;

EID: 79956013447 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1518557 Document Type: Article

Times cited : (41)

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