A high-performance micromachined piezoresistive accelerometer with axially stressed tiny beams

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 993-1000

  Huang, Shusen ^a   Li, Xinxin ^a   Song, Zhaohui ^a   Wang, Yuelin ^a   Yang, Heng ^a   Che, Lufeng ^a   Jiao, Jiwei ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CANTILEVER BEAMS; COMPUTER SIMULATION; DEFORMATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON; STRESSES;

AXIAL-DEFORMATION SCHEME; PIEZOERESISTIVE ACCELEROMETERS; SILICON BULK MICROMACHINING TECHNOLOGY; TINY BEAMS;

ACCELEROMETERS;

EID: 24144437369     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/014     Document Type: Article

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