A triangular electrostatic comb array for micromechanical resonant frequency tuning

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 112-117

  Lee, Ki Bang ^a   Cho, Young Ho ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Frequency tuning; Microresonator; Tuning comb

Indexed keywords

EID: 0002617483     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00122-8     Document Type: Article

References (9)

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