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Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 579-586

Design, fabrication and testing of new comb actuators realizing three-dimensional continuous motions

(3) Ando, Yasuhisa a Ikehara, Tsuyoshi a Matsumoto, Sohei a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Comb actuators; Focused ion beam; Inclined leaf spring; Inductively coupled plasma; Silicon on insulator

Indexed keywords

ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT TESTING; ION BEAMS; MOTION CONTROL; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SPRINGS (COMPONENTS); SUBSTRATES; SUSPENSIONS (COMPONENTS);

COMB ACTUATORS; CONTINUOUS MOTIONS; FOCUSED ION BEAM; HYSTERESIS MOTION; LEAF SPRING;

ELECTROSTATIC ACTUATORS;

EID: 0036543992 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00804-4 Document Type: Conference Paper

Times cited : (24)

References (21)

1
- 0024865148
- IC-processed micro-motors: Design, technology, and testing
- Technical Digest
- Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, Utah, USA, 20-22 February 1989 , pp. 1-6
- Fan, L.S.¹ Tai, Y.C.² Muller, R.S.³

2
- 0028098356
- IC compatible electrostatic polysilicon microrelays
- Proceedings of the IEEE Micro Electro Mechanical Systems, Oiso, Japan, 25-28 January 1994 , pp. 97-101
- Grétillat, M.-A.¹ Thiébaud, P.² De Rooij, N.F.³ Linder, C.⁴

3
- 0026883071
- Polysilicon microgripper
- (1993) Sens. Actuators A , vol.33 , pp. 221-227
- Kim, C.J.¹ Pisano, A.P.² Muller, R.S.³ Lim, M.G.⁴

4
- 0029213852
- SOI 'SIMOX': From bulk to surface micromachining, a new-age for silicon sensors and actuators
- (1995) Sens. Actuators A , vol.46 , pp. 8-16
- Diem, B.¹ Rey, P.² Renard, S.³ Bosson, S.V.⁴ Bono, H.⁵ Michel, F.⁶ Delaye, M.T.⁷ Delapierre, G.⁸

5
- 0027927614
- RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
- Proceedings of the IEEE Micro Electro Mechanical Systems, Oiso, Japan, 25-28 January 1994 , pp. 164-169
- Abe, T.¹ Reed, M.L.²

6
- 0035280918
- PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage
- (2001) Sens. Actuators A , vol.89 , pp. 166-173
- Yee, Y.¹ Nam, H.J.² Lee, S.H.³ Bu, J.U.⁴ Lee, J.W.⁵

7
- 0026370562
- Operation of submicron gap electrostatic comb-drive actuators
- Technical Digest
- Proceedings of the 7th International Conference of Solid-State Sensors and Actuators (Transducers'91), San Francisco, CA, USA, 24-28 June 1991 , pp. 873-876
- Hirano, T.¹ Furuhata, T.² Gabriel, K.J.³ Fujita, H.⁴

8
- 0032099927
- High-aspect-ratio Si vertical micromirror arrays for optical switching
- (1998) J. Microelectromech. Syst. , vol.7 , pp. 207-212
- Juan, W.H.¹ Pang, S.W.²

9
- 0015432806
- Sliding friction under negative load
- (1972) J. Phys. D , vol.5 , pp. 2087-2094
- Skinner, J.¹ Gane, N.²

10
- 85017212355
- Friction characteristics and adhesion force under low normal load
- (1995) Trans. ASME J. Tribol , vol.117 , pp. 569-574
- Ando, Y.¹ Ishikawa, Y.² Kitahara, T.³

11
- 0032050490
- Friction and pull-off forces on submicron-size asperities
- (1998) Wear , vol.216 , pp. 115-122
- Ando, Y.¹ Ino, J.²

12
- 0025604021
- Polysilicon microstructures to characterize static friction
- Proceedings of the IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, 11-14 February 1990 , pp. 82-88
- Lim, M.G.¹ Chang, J.C.² Schultz, D.P.³ Howe, R.T.⁴ White, R.M.⁵

13
- 0029534538
- Micro-instrumentation for tribological measurements
- Technical Digest; (Transducers'95, Eurosensors IX), Stockholm, Sweden, 25-29 June
- (1995) Proceedings of the 8th International Conference Solid-State Sensors and Actuators , vol.2 , pp. 52-55
- Prasad, R.¹ MacDonald, N.² Taylor, D.³

14
- 0029277935
- AFM imaging with an xy-micropositioner with integrated tip
- (1995) Sens. Actuators A , vol.47 , pp. 562-565
- Indermuhle, P.F.¹ Jaecklin, V.P.² Brugger, J.³ Linder, C.⁴ De Rooij, N.F.⁵ Binggeli, M.⁶

15
- 0029313839
- Compensation of hysteresis in solid-state actuators
- (1995) Sens. Actuators A , vol.49 , pp. 97-102
- Schafer, J.¹ Janocha, H.²

16
- 0030686679
- Evaluation of comb-drive nickel micromirror for fiber optical communication
- Proceedings of the IEEE Micro Electro Mechanical Systems, Nagoya, Japan, 26-30 January 1997 , pp. 66-71
- Akimoto, K.¹ Uenishi, Y.² Honma, K.³ Nagaoka, S.⁴

17
- 0035018048
- Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
- Proceedings of the IEEE Micro Electro Mechanical Systems, Interlaken, Switzerland, 21-25 January 2001 , pp. 535-538
- Dubois, Ph.¹ Guldimann, B.² Gretillat, M.-A.³ De Rooij, N.F.⁴

18
- 0011447482
- A resonantly excited 2D-micro-scanning-mirror with large deflection
- (2001) Sens. Actuators A , vol.89 , pp. 104-111
- Schenk, H.¹ Durr, P.² Kunze, D.³ Lakner, H.⁴ Kuck, H.⁵

19
- 0002773910
- High density vertical comb array microactuators fabricated using a novel bulk/poly-silicon trench refill technology
- Technical Digest
- Proceedings of the 7th International Conference Solid-State Sensors and Actuators, Hilton Head Island, SC, USA, 13-16 June 1994 , pp. 138-141
- Selvakumar, A.¹ Najafi, K.²

20
- 0029181115
- Vertical comb array microactuators
- Proceedings of the IEEE Micro Electro Mechanical Systems, Amsterdam. The Netherlands, 29 January-2 February 1995 , pp. 43-48
- Selvakumar, A.¹ Najafi, K.² Juan, W.H.³ Pang, S.⁴

21
- 5144233350
- Simulation of anisotropy effects on crystal-silicon diaphragm used for pressure sensors
- Technical Digest
- Proceedings of the 13th Sensor Symposium, Kawasaki, Japan, 5-6 January 1995 , pp. 149-152
- Ikehara, T.¹ Kato, C.² Suzuki, Y.³ Fukuhara, S.⁴ Watanabe, T.⁵

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