Analysis of lateral instability of in-plane comb drive MEMS actuators based on a two-dimensional model

Sensors and Actuators, A: Physical

Volumn 113, Issue 1, 2004, Pages 78-85

  Huang, Wei ^a   Lu, Ganyu ^a  

^a MEMS Research Consulting   (United States)

Author keywords

"Pull in" instability; Comb drive; Electrostatic actuation; Lateral and angular offset; MEMS; Microelectromechanical system

Indexed keywords

ACTUATORS; ALGORITHMS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MATHEMATICAL MODELS; MATRIX ALGEBRA; NUMERICAL METHODS; PERMITTIVITY; STIFFNESS; VOLTAGE MEASUREMENT;

"PULL-IN" INSTABILITY; COMB DRIVE; LATERAL AND ANGULAR OFFSET; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 2942700145     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.032     Document Type: Article

References (15)

1. Tang W.C., Nguyen T.C.H., Judy M.W., Howe R.T. Electrostatic-comb drive of lateral polysilicon resonators. Sens. Actuators A. 21-23:1990;328-331.
2. Hirano T., Furuhata T., Gabriel K.J., Fujita H. Design, fabrication, and operation of submicron gap comb-drive microactuators. J. MEMS. 1:1992;52-59.
3. Lee K., Cho Y. A triangular electrostatic comb array for micromechanical resonant frequency tuning. Sens. Actuators A. 70:1998;112-117.
4. H.Y. Lin, W. Fang, Out-of-plane comb-drive lever actuator, in: Proceedings of the ASME IMECE, Orlando, FL, USA, 2000, pp. 97-102.
5. Ye W., Mukherjee S., MacDonald N.C. Optimal shape design of an electrostatic comb drive in microelectromechanical systems. J. MEMS. 7:1998;16-26.
6. Johnson W.A., Warne L.K. Electrophysics of micromechanical comb actuators. J. MEMS. 4:1995;49-59.
7. Dec A., Suyama K. Micromachined varactor with wide tuning range. Electronics Lett. 33:1997;922-924.
8. Nathanson H.C., Newell W.E., Wickstrom R.A., Davis J.R. The resonant gate transistor. IEEE Trans. Electron Devices. 14:1967;117-133.
9. Bochobza-Degani O., Elata D., Nemirovsky Y. A general relation between the ranges of stability of electrostatic actuators under charge or voltage control. Appl. Phys. Lett. 82:2003;302-304.
10. Bochobza-Degani O., Socher E., Lipson A., Leitner T., Setter D.J., Kaldor S., Nemirovsky Y. Pull-in study of an electrostatic torsion micro-actuator. J. MEMS. 7:1998;373-378.
11. Pamidighantam S., Puers R., Baert K., Tilmans H.A.C. Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions. J. Micromech. Microeng. 12:2002;458-464.
12. D. Bernstein, P. Guidotti, J.A. Pelesko, Mathematical analysis of an electrostatically actuated MEMS Devices, in: Proceedings of the International Conference Modeling and Simulation of Microsystems, San Diego, CA, USA, 2000, pp. 489-492.
13. Zhou G., Dowd P. Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators. J. Micromech. Microeng. 13:2003;178-183.
14. P.B. Chu, K.S.J. Pister, Analysis of closed-loop control of parallel-plate electrostatic microgrippers, in: Proceedings of the IEEE International Conference Robotics and Automation, San Diego, CA, USA, 1994, pp. 820-825.
15. J.I. Seeger, S.B. Crary, Stabilization of electrostatically actuated mechanical devices, in: Proceedings of the Ninth International Conference Solid-State Sensors and Actuators, Chicago, IL, USA, 1997, pp. 1133-1136.