Electrostatic model for an asymmetric combdrive

Journal of Microelectromechanical Systems

Volumn 9, Issue 1, 2000, Pages 126-135

  Yeh, J L Andrew ^a   Hui, Chung Yuen ^b   Tien, Norman C ^a  

^a Cornell University   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; ELECTRIC FIELDS; ELECTRODES; ELECTROSTATICS; FORCE MEASUREMENT; MATHEMATICAL MODELS; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY; TORQUE;

ASYMMETRIC COMBDRIVE; ELECTROSTATIC ACTUATION; IN-PLANE INTERDIGITATED COMBDRIVE; TORSIONAL MOTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033897204     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.825787     Document Type: Article

References (19)

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