Skin-effect self-heating in air-suspended RF MEMS transmission-line structures

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1622-1631

  Chow, Linda L W ^a   Wang, Zhongde ^b   Jensen, Brian D ^c   Saitou, Kazuhiro ^a   Volakis, John L ^d   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b ANSOFT CORPORATION   (United States)

^c 435 Crabtree Technology Building   (United States)

^d The Ohio State University   (United States)

Author keywords

Coplanar waveguides (CPWs); Failure analysis; Microelectromechanical devices; Skin effect; Transmission lines

Indexed keywords

ELECTRIC LINES; ELECTRIC RESISTANCE; ENERGY TRANSFER; FAILURE ANALYSIS; MATHEMATICAL MODELS; SKIN EFFECT; WAVEGUIDES;

ELECTRICAL RESISTANCE THERMOMETRY; JOULE HEATING; RADIO-FREQUENCY SIGNALS;

MICROELECTROMECHANICAL DEVICES;

EID: 33845521472     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883581     Document Type: Article

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