Power capabilities of RF MEMS

Proceedings of the International Conference on Microelectronics

Volumn 24 I, Issue , 2004, Pages 65-70

  Ducarouge, B ^a   Dubuc, D ^a   Flourens, F ^a   Melle, S ^a   Ongareau, E ^c   Grenier, K ^a   Boukabache, A ^a   Conedera, V ^a   Pons, P ^a   Perret, E ^b   Aubert, H ^b   Plana, R ^a   Chauffleur, X ^b  

^a LAAS CNRS   (France)

^b Epsilon Engineerie ^*  (France)

^c MBDA FRANCE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROMIGRATION; INTEGRATED CIRCUITS; PERMITTIVITY; RELIABILITY; STIFFNESS; THERMAL EFFECTS; TOPOLOGY;

POWER CAPABILITIES; TUNABLE FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142664634     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

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