Micromachined DC contact capacitive switch on low-resistivity silicon substrate

Sensors and Actuators, A: Physical

Volumn 127, Issue 1, 2006, Pages 24-30

  Yu, A B ^a   Liu, A Q ^a   Zhang, Q X ^b,c   Alphones, A ^a,d   Hosseini, H M ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c MEMS   (United States)

^d IEEE

Author keywords

Capacitive shunt switch; CPW transmission line; DC contact switch; RF MEMS

Indexed keywords

CAPACITIVE SHUNT SWITCH; CPW TRANSMISSION LINE; DC CONTACT SWITCH; RF MEMS;

CAPACITANCE; DIELECTRIC MATERIALS; MICROELECTROMECHANICAL DEVICES; OPTICAL WAVEGUIDES; SILICON; SUBSTRATES;

ELECTRIC SWITCHES;

EID: 32844463137     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.011     Document Type: Article

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