Monolithic integration of RF-MEMS and semiconductor devices for the K-Band

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 131-138

  Buck, Thomas ^a   Reimann, Mathias ^a   Ulm, Markus ^a   Mueller Fiedler, Roland ^a   Seidel, Juergen ^a   Kasper, Erich ^b   Schoellhorn, Claus ^b   Haak, Stefan ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

K Band; Monolithic integration; Phaseshifter; RF MEMS; Subharmonic mixer

Indexed keywords

ACTUATORS; ETCHING; METALLIZING; MOLECULAR BEAM EPITAXY; PHASE SHIFTERS; SCHOTTKY BARRIER DIODES;

SUBHARMONIC MIXERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038735509     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479563     Document Type: Conference Paper

References (8)

1. W. Zhao, C. Schoellhorn, and E. Kasper, "Interface loss mechanism of millimeter-wave coplanar waveguides on silicon", IEEE Transactions on Microwave Theory and Techniques 50, 2002.
2. E. Kasper and W. Zhao, "Silicon mm-wave integrated circuits (SIMMWIC)", in 11th Workshop on the Physics of Semiconductor Devices, Proceedings, pp. 763-770, Allied Publishers, New Delhi, 2002.
3. J. Eberhardt and E. Kasper, "Ni/Ag metallization for SiGe HBTs using a Ni suicide contact", Semiconductor Science and Technology 16, 2001.
4. M. Ulm, M. Reimann, T. Walter, R. Mueller-Fiedler, and E. Kasper, "Capacitive RF MEMS switches for the W-Band", in 31st European Microwave, Conference 2001 I, pp. 287-290, CMP Europe Ltd., 2001.
5. M. W. Chapman and S. Raman, "A 60GHz uniplanar MMIC 4X subharmonic mixer", IEEE MTT-S Digest, pp. 95-98, 2001.
6. N. Barker and G. Rebeiz, "Optimization of distributed MEMS transmission-line phase shifters - u-Band and w-Band designs", IEEE Transactions on Microwave Theory and Techniques 48, pp. 1957-1966, 2000.
7. G. M. Rebeiz, G. Tan, and J. S. Hayden, "RF-MEMS phase shifters: Design and applications", IEEE-Microwave Magazine 6, pp. 72-81, 2002.
8. M. Reimann, M. Ulm, T. Buck, R. Mueller-Fiedler, and W. Heinrich, "Vertical silicon K-Band CPW through-wafer interconnects", in EUMC 2002, Proceedings, 2002.