A low-voltage high contact force RF-MEMS switch

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2004, Pages 577-580

  Nishijima, Noriyo ^a   Hung, Juo Jung ^b   Rebeiz, Gabriel M ^b  

^a HITACHI LTD   (Japan)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Actuators; Microelectromechanical Devices; Relays; Switches

Indexed keywords

ACTUATION VOLTAGE; CONTACT FORCE; RESTORATION FORCE;

ACTUATORS; ELECTRIC POTENTIAL; ELECTRIC RELAYS; ELECTRODES; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES;

ELECTRIC SWITCHES;

EID: 4444295287     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. S. Majumder, J. Lampen, R. Morrison and J. Maciel, "A Packaged, High-Lifetime Ohmic MEMS RF Switch," IEEE MTT-S Int. Microwave Symp., pp.1935-1938, June 2003.
2. R. E. Mihailovich, M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, and J. F. Denatale, "MEMS relay for reconfigurable RF circuits," IEEE Microwave Wireless Comp. Lett., Vol.11, No.2, pp.53-55, February 2001.
3. A. S. Morris, III, S. Cunningham, D. Dereus, G. Schröpfer, "High-Performance Integrated RF-MEMS: Part 1 - The Process," 33rd European Microwave Conference, pp.21-24, October 2003.
4. Ph. Robert, D. Saias, C. Billard, S. Boret, N. Sillon, C. Maeder-Pachurka, P.L. Charvet, G.Bouche, P. Ancey, and P. Berruyer "Integrated RF- MEMS switche based on a combination of thermal and electrostatic actuation," Transducer, Vol.2, pp.1714-1717, June 2003.
5. G. M. Rebeiz, RF MEMS theory, design, and technology, New Jersey: J. Wiley & Sons, 2003.
6. J. Muldavin, R. Boisvert, C. Bozler, S. Rabe, C Keast, "Power Handling and Linearity of MEMS Capacitive Series Switches," IEEE MTT-S Int. Microwave Symp., pp. 1915-1918, June 2003.