Microactuators using R-phase transformation of sputter-deposited Ti-47.3Ni shape memory alloy thin films

Journal of Intelligent Material Systems and Structures

Volumn 17, Issue 12, 2006, Pages 1049-1058

  Tomozawa, Masanari ^a   Kim, Hee Young ^a   Miyazaki, Shuichi ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

MEMS; Microactuator; R phase transformation; Shape memory alloy; Sputter deposition; Thin film; Ti Ni

Indexed keywords

HEAT TREATMENT; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS;

ACTUATION; TEMPERATURE HYSTERESIS;

MICROACTUATORS;

EID: 33751560667     PISSN: 1045389X     EISSN: 15308138     Source Type: Journal    
DOI: 10.1177/1045389X06064883     Document Type: Article

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