Applications of TiNi thin film shape memory alloys in micro-opto-electro-mechanical systems

Sensors and Actuators, A: Physical

Volumn 77, Issue 1, 1999, Pages 34-38

  Tabib Azar, M ^a   Sutapun, B ^a   Huff, M ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUSTENITIC TRANSFORMATIONS; HEAT TREATMENT; LIGHT MODULATORS; LIGHT TRANSMISSION; MARTENSITIC TRANSFORMATIONS; MICROACTUATORS; OPTOELECTRONIC DEVICES; SHAPE MEMORY EFFECT; THIN FILMS; TITANIUM NITRIDE;

MICRO-OPTO-ELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033362641     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00053-9     Document Type: Article

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