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Materials Science Forum

Volumn 394-395, Issue , 2002, Pages 467-474

Dynamic characteristics of diaphragm microactuators utilizing sputter-deposited TiNi shape-memory alloy thin films

(3) Miyazaki, S a Hirano, M a No, V H a

a UNIVERSITY OF TSUKUBA (Japan)

Author keywords

Dynamic Characteristics; Martensitic Transformation; Microactuator; Thin Film; TiNi Shape Memory Alloy

Indexed keywords

DIAPHRAGMS; ETCHING; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; MICROACTUATORS; SILICA; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS;

SHAPE RECOVERY;

SHAPE MEMORY EFFECT;

EID: 17144473694 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.394-395.467 Document Type: Conference Paper

Times cited : (20)

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