Characterization of high-speed microactuator utilizing shape memory alloy thin films

Materials Science Forum

Volumn 475-479, Issue III, 2005, Pages 2037-2042

  Tomozawa, M ^a   Okutsu, K ^a   Kim, H Y ^a   Miyazaki, S ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Microactuator; R phase transformation; Shape memory alloy; Thin film; Ti Ni; Ti Ni Pd

Indexed keywords

COOLING; DEPOSITION; HEAT TREATMENT; HYSTERESIS; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; MICROMACHINING; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SILICON; THERMAL EFFECTS; THIN FILMS; TITANIUM ALLOYS;

COOLING RATES; R-PHASE TRANSFORMATION; TI-NI; TI-NI-PD;

MICROACTUATORS;

EID: 17044380925     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-960-1.2037     Document Type: Conference Paper

References (11)

1. S. Miyazaki and A. Ishida: Mater. Science Eng. A273-275(1999), p. 106.
2. S. Miyazaki, Y. Ohmi, K. Otsuka and Y. Suzuki: J. Phys. (France) 43 (1982) C4-255.
3. S. Miyazaki: Engineering Aspect of Shape Memory Alloys, ED. by T. W. Duering, K. N. Melton, D. Stöckel and C. M. Wayman, Butterworth-Heinemann Ltd., Guidford, UK, (1990), p. 394.
4. S. Miyazaki and K. Otsuka: ISIJ Int. 29 (1989), p. 353.
5. S. Miyazaki, M. Hirano and V. H. No: Materials Science Forum Vols. 394-395 (2002) pp. 467.
6. M. Hirano, H. Hosoda, H. Suzuki and S. Miyazaki: Trans. Mater. Rcs. Soe. Jpn., 26 (2001). 133.
7. E. Makino, K. Kato and T. Shibata: Sensors and Actuators 75 (1999) 156.
8. E. Makino, T. Mitsuya and T. Shibata: Sensors and Actuators 79 (1999) 163.
9. E. Makino, T. Mitsuya and T. Shibata: Sensors and Actuators 79 (2000) 251.
10. D. Xu, L. Wang, G. Ding, Y. Zhou, A. Yu and B. Cai: Sensors and Actuators A 93 (2001) 87.
11. D. D. Shin, K. P. Mohanchandra and G. P. Carman: Sensors and Actuators A 111 (2004) 166.