Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation

Sensors and Actuators, A: Physical

Volumn 75, Issue 2, 1999, Pages 156-161

  Makino, Eiji ^a   Kato, Kazuhiro ^a   Shibata, Takayuki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEFORMATION; ELASTICITY; EVAPORATION; MARTENSITIC TRANSFORMATIONS; PRESSURE EFFECTS; SHAPE MEMORY EFFECT; SILICON WAFERS; STRAIN; STRESSES; THIN FILM DEVICES; TITANIUM NITRIDE;

BULGER TEST; FLASH EVAPORATION;

MICROACTUATORS;

EID: 0032647360     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00003-5     Document Type: Article

References (20)

1. Honma D., Miwa Y., Iguchi N. Micromanipulators applied shape memory effect. J. Jpn. Soc. Prec. Eng. 50:1984;378-382. (in Japanese).
2. Hirose S., Ikuta K., Tsukamoto M. Development of shape memory alloy actuator. J. Robot Soc. Japan. 5:1987;87-100. (in Japanese).
3. G. Lim, K. Minami, M. Sugihara, M. Uchiyama, M. Esashi, Active catheter with multi-link structure based on silicon micromachining, Proc. IEEE MEMS95, Amsterdam, The Netherlands, Jan. 31, 1995, pp. 116-121.
4. Ueda Y. Medical application of micromachine technology. J. Jpn. Soc. Prec. Eng. 62:1996;368-372. (in Japanese).
5. Park K., Minami K., Esashi M. An integrated communication and control system for a multi-link active catheter. J. Micromech. Microeng. 6:1996;345-351.
6. D. Reynaerts, J. Peirs, H.V. Brussel, A SMA-actuated implantable system for delivery of liquid drugs, Proc. Actuators 96, 5th Int. Conf. New Actuators, Bremen, Germany, June 1996, pp. 379-382.
7. D. Reynaerts, J. Peirs, H.V. Brussel, Design of a shape memory actuated gastrointestinal intervention system, Proc. Actuators 96, 5th Int. Conf. New Actuators, Bremen, Germany, June 1996, pp. 409-412.
8. Walker J.A., Gabriel K.J. Thin-film processing of Ti-Ni shape memory alloy. Sensors and Actuators. A21-A23:1990;243-246.
9. Busch J.D., Johnson A.D. Shape memory properties in Ni-Ti sputter-deposited film. J. Appl. Phys. 68:1990;6224-6228.
10. Johnson A.D. Vacuum-deposited TiNi shape memory film: characterization and application in microdevices. J. Micromech. Microeng. 1:1991;34-41.
11. Ishida A., Takei A., Miyazaki S. Shape memory thin film of Ti-Ni formed by sputtering. Thin Solid Films. 228:1993;210-214.
12. Wolf R.H., Heuer A.H. TiNi (shape memory) films on silicon for MEMS applications. J. Microelectromech. Syst. 4:1995;206-212.
13. Krulevitch P., Lee A.P., Ramsey P.B., Trevino J.C., Hamilton J., Northrup M.A. Thin film shape memory alloy microactuators. J. Microelectromech. Syst. 5:1996;270-282.
14. Makino E., Uenoyama M., Shibata T. Flash evaporation of TiNi shape memory thin film for microactuators. Sensors and Actuators A. 71:1998;187-192.
15. Caltin A., Walker W.P. Mechanical properties of thin single-crystal gold films. J. Appl. Phys. 31:1960;2135-2139.
16. Jovanovic S., Smith C.S. Elastic modulus of amorphous nickel films. J. Appl. Phys. 32:1961;121-122.
17. Papirno R. Stress and strain in films bulged over circular openings. J. Appl. Phys. 32:1961;1175-1176.
18. Leidheiser H. Jr., Sloope B.W. Mechanical properties of copper films. J. Appl. Phys. 41:1970;402-406.
19. Hill R. A theory of the plastic bulging of a metal diaphragm by lateral pressure. Philos. Mag. 41:1950;1133-1142.
20. Gleyzal A. Plastic deformation of a circular diaphragm under pressure. J. Appl. Mech. 14:1948;288-296.