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Volumn 111, Issue 2-3, 2004, Pages 166-171

High frequency actuation of thin film NiTi

Author keywords

Frequency; Nickel titanium; Thin film

Indexed keywords

ACTUATORS; COOLING; DATA ACQUISITION; FREQUENCIES; FREQUENCY RESPONSE; HEAT CONDUCTION; HEAT LOSSES; HEAT SINKS; NICKEL COMPOUNDS; PRESSURE EFFECTS; PRESSURIZATION; SHAPE MEMORY EFFECT; THERMAL EFFECTS; ULTRAHIGH VACUUM;

EID: 1242343669     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.09.026     Document Type: Article
Times cited : (38)

References (16)
  • 2
    • 0025698123 scopus 로고
    • Thin-film processing of TiNi shape memory alloy
    • Walker J., Gabriel K. Thin-film processing of TiNi shape memory alloy. Sens. Actuators. 21:1990;243-246.
    • (1990) Sens. Actuators , vol.21 , pp. 243-246
    • Walker, J.1    Gabriel, K.2
  • 5
  • 6
    • 0032164542 scopus 로고    scopus 로고
    • The TiNi shape-memory alloy and its applications for MEMS
    • Kahn H., Huff M.A., Heuer A.H. The TiNi shape-memory alloy and its applications for MEMS. J. Micromech. Microeng. 8:1998;213-221.
    • (1998) J. Micromech. Microeng. , vol.8 , pp. 213-221
    • Kahn, H.1    Huff, M.A.2    Heuer, A.H.3
  • 7
    • 0030643164 scopus 로고    scopus 로고
    • Titanium-nickel shape memory thin film actuators for micromachined valves
    • Kahn H., Benard W.L., Huff M.A., Heuer A.H. Titanium-nickel shape memory thin film actuators for micromachined valves. Mater. Res. Soc. Symp. Proc. 444:1997;227-232.
    • (1997) Mater. Res. Soc. Symp. Proc. , vol.444 , pp. 227-232
    • Kahn, H.1    Benard, W.L.2    Huff, M.A.3    Heuer, A.H.4
  • 8
    • 0033906310 scopus 로고    scopus 로고
    • Dynamic actuation properties of TiNi shape memory diaphragm
    • Makino E., Mitsuya T., Shibata T. Dynamic actuation properties of TiNi shape memory diaphragm. Sens. Actuators. 79:2000;128-135.
    • (2000) Sens. Actuators , vol.79 , pp. 128-135
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 9
    • 0033906772 scopus 로고    scopus 로고
    • Micromachining of TiNi shape memory thin film for fabrication of micropump
    • Makino E., Mitsuya T., Shibata T. Micromachining of TiNi shape memory thin film for fabrication of micropump. Sens. Actuators. 79:2000;251-259.
    • (2000) Sens. Actuators , vol.79 , pp. 251-259
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 10
    • 0034833238 scopus 로고    scopus 로고
    • Fabrication of TiNi shape memory micropump
    • Makino E., Mitsuya T., Shibata T. Fabrication of TiNi shape memory micropump. Sens. Actuators. 88:2001;256-262.
    • (2001) Sens. Actuators , vol.88 , pp. 256-262
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 11
    • 0032647360 scopus 로고    scopus 로고
    • Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation
    • Makino E., Kato K., Shibata T. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation. Sens. Actuators A: Phys. 75:1999;156-161.
    • (1999) Sens. Actuators A: Phys. , vol.75 , pp. 156-161
    • Makino, E.1    Kato, K.2    Shibata, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.