Micromachining of TiNi shape memory thin film for fabrication of micropump

Sensors and Actuators, A: Physical

Volumn 79, Issue 3, 2000, Pages 251-259

  Makino, Eiji ^a   Mitsuya, Takashi ^a   Shibata, Takayuki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ETCHING; MICROMACHINING; SHAPE MEMORY EFFECT; SILICON; SUBSTRATES; THIN FILMS; TITANIUM ALLOYS; VACUUM TECHNOLOGY;

ANODIC BONDING; DIFFUSION BONDING; MICROPUMPS;

CHEMICAL SENSORS;

EID: 0033906772     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00290-3     Document Type: Article

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