메뉴 건너뛰기




Volumn 78, Issue 2, 1999, Pages 163-167

Dynamic thermo-mechanical properties of evaporated TiNi shape memory thin film

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EVAPORATION; MARTENSITIC TRANSFORMATIONS; SHAPE MEMORY EFFECT; THERMAL CYCLING; THIN FILMS; TITANIUM ALLOYS;

EID: 0033358420     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00222-8     Document Type: Article
Times cited : (29)

References (15)
  • 7
    • 0027041292 scopus 로고
    • A micro membrane pump with electrostatic actuation
    • Travemunde, Germany
    • R. Zengerle, A. Richter, H. Sandmaier, A micro membrane pump with electrostatic actuation, Proc. IEEE MEMS-92, Travemunde, Germany, 1992, pp. 19-24.
    • (1992) Proc. IEEE MEMS-92 , pp. 19-24
    • Zengerle, R.1    Richter, A.2    Sandmaier, H.3
  • 9
    • 0025698123 scopus 로고
    • Thin-film processing of Ti-Ni shape memory alloy
    • Walker J.A., Gabriel K.J. Thin-film processing of Ti-Ni shape memory alloy. Sensors and Actuators. A21-A23:1990;243-246.
    • (1990) Sensors and Actuators , vol.2123 , pp. 243-246
    • Walker, J.A.1    Gabriel, K.J.2
  • 10
    • 0025669749 scopus 로고
    • Prototype micro-valve actuator
    • Napa, CA, USA
    • J.D. Busch, A.D. Johnson, Prototype micro-valve actuator, Proc. IEEE MEMS-90, Napa, CA, USA, 1990, pp. 40-41.
    • (1990) Proc. IEEE MEMS-90 , pp. 40-41
    • Busch, J.D.1    Johnson, A.D.2
  • 11
    • 0026119097 scopus 로고
    • Vacuum-deposited TiNi shape memory film: Characterization and applications in microdevices
    • Johnson A.D. Vacuum-deposited TiNi shape memory film: characterization and applications in microdevices. J. Micromech. Microeng. 1:1991;34-41.
    • (1991) J. Micromech. Microeng. , vol.1 , pp. 34-41
    • Johnson, A.D.1
  • 12
    • 0029429844 scopus 로고
    • TiNi (shape memory) films on silicon for MEMS applications
    • Wolf R.H., Heuer A.H. TiNi (shape memory) films on silicon for MEMS applications. J. Microelectromech. Syst. 4:1995;206-212.
    • (1995) J. Microelectromech. Syst. , vol.4 , pp. 206-212
    • Wolf, R.H.1    Heuer, A.H.2
  • 14
    • 0032312133 scopus 로고    scopus 로고
    • Flash evaporation of TiNi shape memory thin film for microactuators
    • Makino E., Uenoyama M., Shibata T. Flash evaporation of TiNi shape memory thin film for microactuators. Sensors and Actuators A. 71:1998;187-192.
    • (1998) Sensors and Actuators a , vol.71 , pp. 187-192
    • Makino, E.1    Uenoyama, M.2    Shibata, T.3
  • 15
    • 0032647360 scopus 로고    scopus 로고
    • Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation
    • Makino E., Kato K., Shibata T. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation. Sensors and Actuators A. 75/2:1999;156-161.
    • (1999) Sensors and Actuators a , vol.752 , pp. 156-161
    • Makino, E.1    Kato, K.2    Shibata, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.